发明名称 |
Vibration mirror, optical scanning device, and image forming using the same, method for making the same, and method for scanning image |
摘要 |
A vibration mirror is reciprocatively vibrated by an electrostatic force to reflect an incident light beam. The vibration mirror comprises a reflection means for reflecting the incident light beam; a reflection means holding substrate for holding the reflection means; a torsional rotation shaft comprising rod members rotatably supporting two ends of the reflection means holding substrate; movable electrodes formed on side faces of the reflection means holding substrate supported; a first substrate for supporting the reflection means supporting substrate via the torsional rotation shaft; first fixed electrodes formed on the first substrate so as to face the movable electrodes; a first electrically insulating and separating means formed on the first substrate to electrically insulate and separate the movable electrodes from the first fixed electrodes; and a second substrate overlaid on the first substrate with an insulating layer therebetween so as to be electrically insulated from and overlapped to adhere onto the first substrate.
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申请公布号 |
US7417780(B2) |
申请公布日期 |
2008.08.26 |
申请号 |
US20050216180 |
申请日期 |
2005.09.01 |
申请人 |
RICOH COMPANY, LTD. |
发明人 |
FUJII MITSUMI;SATOH YUKITO;NAKAJIMA TOMOHIRO |
分类号 |
G02B26/08;B41J2/47;B81B3/00;G02B26/10;G06K7/10 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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