| 发明名称 |
Thermally cured undercoat for lithographic application |
| 摘要 |
Thermally curable undercoat composition comprising for producing a bilayer relief image comprising: a) a polymer of Structure I comprising repeating units of Structure II, III, and IV b) a phenolic crosslinker; c) a thermal acid generator (TAG); and d) a solvent.
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| 申请公布号 |
US7416821(B2) |
申请公布日期 |
2008.08.26 |
| 申请号 |
US20050075518 |
申请日期 |
2005.03.09 |
| 申请人 |
FUJIFILM ELECTRONIC MATERIALS, U.S.A., INC. |
发明人 |
DE BINOD B;MALIK SANJAY;KOCAB J. THOMAS;SARUBBI THOMAS |
| 分类号 |
G03C3/00;G03C1/492;G03F7/09 |
主分类号 |
G03C3/00 |
| 代理机构 |
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代理人 |
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