| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate maintenance by preventing damage of resin bolts in a processing head including an electrode of a plasma processing device. <P>SOLUTION: Head constituent members 21-23 including the electrode 23 of the processing head 20 of this plasma processing device M are connected together by the resin bolts 30. A head part 31 of each resin bolt 30 is covered with a cover material 40. The cover material 40 has fluidity in being attached to the bolt head part 31, separably adheres and solidifies after the attachment, and can be detachable by itself. The cover material 40 is preferably formed of vinylpolysiloxane. <P>COPYRIGHT: (C)2008,JPO&INPIT |
