| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an alignment method and its apparatus improving work efficiency and suppressing variation of quality by incorporating them into various types of processors. <P>SOLUTION: A substrate 11 to be processed and having an alignment mark 12, is mounted on each of a plurality of adsorption tables 3 arranged on a stage 2. On the basis of position data of the alignment mark 12 of the substrate 11, provided by imaging it by a camera 10 for alignment mark imaging, alignment mechanisms arranged around each adsorption table 3 are controlled. The substrate 11 is controlled in X, Y,θdirections via alignment pins 4d, 6d, 8d of movement control units 4, 6, 8, and pusher pins 5d, 7d, 9d of movement support units 5, 7, 9 composing the alignment mechanisms so as to carry out alignment. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
