发明名称 SEMICONDUCTOR DEVICE HAVING HIGH FREQUENCY WIRING AND DUMMY METAL LAYER AT MULTILAYER WIRING STRUCTURE
摘要 A semiconductor device includes a semiconductor substrate, a plurality of wiring layers provided on the semiconductor substrate, a high frequency wiring provided at a first layer in the plurality of wiring layers, and a plurality of dummy metals provided in a second layer provided between the semiconductor substrate and the first layer having the high frequency wiring. The plurality of wiring layers at a top view includes a high frequency wiring vicinity region and an external region surrounding the high frequency wiring vicinity region, the high frequency wiring vicinity region including a first region enclosed by an outer edge of the high frequency wiring and a second region surrounding the first region. The plurality of dummy metals are disposed dispersedly in the high frequency wiring vicinity region and in the external region respectively.
申请公布号 US2016163660(A1) 申请公布日期 2016.06.09
申请号 US201615042305 申请日期 2016.02.12
申请人 RENESAS ELECTRONICS CORPORATION 发明人 UCHIDA SHINICHI
分类号 H01L23/66;H01L23/528;H01L23/522 主分类号 H01L23/66
代理机构 代理人
主权项
地址 Tokyo JP