MODIFIER FOR LOW DIELECTRIC CONSTANT FILM, AND METHOD FOR PRODUCTION THEREOF

摘要

Disclosed is a modifier for lowering the relative dielectric constant of a low dielectric constant film for use in a semiconductor device. Specifically disclosed is a modifier for a low dielectric constant film, which is characterized by comprising a silicon compound represented by the formula (1) as an active ingredient. R_3-nH_nSiN₃ (1) wherein R represents a C1-C4 alkyl group; and n represents an integer of 0 to 3.