发明名称 |
PIEZOELECTRIC DEVICE, OSCILLATION TYPE GYRO SENSOR, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE |
摘要 |
A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.
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申请公布号 |
US2008196498(A1) |
申请公布日期 |
2008.08.21 |
申请号 |
US20070960041 |
申请日期 |
2007.12.19 |
申请人 |
SONY CORPORATION |
发明人 |
SUZUKI KOJI;INAGUMA TERUO;TAKAHASHI KAZUO |
分类号 |
G01C19/56;H01L41/22 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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