| 摘要 |
<p>A sensor electrode and a wiring pattern can be formed by less number of steps, and wiring and an optical substrate are easily assembled together without interference between them. A variable spectroscopic element (1) having two optical substrates (3a, 3b) that are spaced from and facing each other and have reflection coatings on the facing faces; an actuator (3c) for changing the distance between the optical substrates (3a, 3b); and a sensor (6) having, on the facing faces, electrodes (6a, 6b) for detecting the distance between the optical substrates (3a, 3b). At least either of the optical substrates (3a, (3b)) has a tilt surface (5), a wiring pattern (6a, (6b)), and a connection pattern (6e, (6f)). The wiring pattern (6a, (6b)) is provided at the outer periphery of the facing face and tilts such that, the farther it extends radially outward, the progressively farther it is in a thickness direction from the other the optical substrates (3b, (3a). The wiring pattern (6a, (6b)) is provided on the tilt surface (5) and is connected to the electrode (6a, (6b)) of the sensor (6). The connection pattern (6e, (6f)) is provided at the radially outside of the wiring pattern (6c, 6(d)), and a wiring (7) for taking out to the outside a signal from the electrode (6a, (6b)) is connected to the connection pattern (6e, (6f)).</p> |
