<p>An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.</p>
申请公布号
WO2008100296(A1)
申请公布日期
2008.08.21
申请号
WO2007US22467
申请日期
2007.10.23
申请人
MKS INSTRUMENTS, INC.;VALCORE, JOHN;HAN, YUFENG;SMYKA, JONATHAN;POLIZZO, SALVATORE;RADOMSKI, AARON, T.
发明人
VALCORE, JOHN;HAN, YUFENG;SMYKA, JONATHAN;POLIZZO, SALVATORE;RADOMSKI, AARON, T.