| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent the dust of a resistor generated when trimming the resistor of a chip component or the like using a laser from being stuck to a probe and causing a short-circuit. <P>SOLUTION: The laser trimming apparatus comprises a base 10 for holding and carrying an object 9 to be measured, a probe card 11 provided on the base 10 for measuring the characteristics of the object 9 to be measured, and a laser beam irradiation part 24 for adjusting the characteristics by irradiating the object 9 to be measured with a laser beam 25. The probe card 11 comprises a planar base material 15 provided with a roughly rectangular through-hole 15a, a plurality of probes 13 inserted to the through-hole 15a and arranged in one line facing the outer edge part, and a nozzle part 14 provided on both outer edge parts of the through-hole 15a across the plurality of probes 13 for jetting gases 21 and 22. The nozzle part 14 is inclined so that the gases 21 and 22 jetted from the nozzle part 14 flow to a fixed direction at the meeting part. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
