| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminated wiring and a laminated electrode for liquid crystal display device which is composed of a thin copper alloy laminated film excellent in adhesion to a glass substrate surface without causing any thermal defect such as hillock or void, and to provide a method for forming them. SOLUTION: The laminated wire and the laminated electrode are formed of a composite copper alloy layer formed by laminating a thin copper alloy film having the composition containing a total of 0.01-2 atom % of one or two or more kinds out of rare earth elements, 0.05-2 atom % of Ag, and the balance Cu with inevitable impurities, and an oxygen-containing thin copper alloy film having the composition containing a total of 0.01-2 atom % of one or two or more kinds out of rare earth elements, 0.05-2 atom % of Ag, and 0.02-2 atom % O, and the balance Cu with inevitable impurities. COPYRIGHT: (C)2008,JPO&INPIT
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