| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for observing a sample 1 using a TEM lens barrel and a high-resolution scanning type microscope 10. SOLUTION: The sample position for observing the sample with the TEM lens barrel is different from a position for observing the sample with the optical microscope. In the optical microscope, the sample is inclined in the direction of the optical microscope. Preferably, by the scanning type microscope with monochromatic light, a lens element 11 in the optical microscope facing the position of the sample can be made fully small so that it can be positioned between a magnetic pole surface 8A and a magnetic pole surface 8B in a (magnetic) particle optical objective lens 7, which is in contrast to an objective lens system that has been used in optical microscopes conventionally and shows a large diameter. Further, the optical microscope or a component 11 close to at least the sample can be drawn in so that space is released in imaging in a TEM mode. COPYRIGHT: (C)2008,JPO&INPIT |
