| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a liquid crystal device and a manufacturing method of the liquid crystal device by which a foreign matter adhering to a substrate surface can be efficiently removed. SOLUTION: The manufacturing apparatus of the liquid crystal device washing substrates for the liquid crystal device is provided with a pallet having a plurality of substrate placing parts placing the plurality of substrates for the liquid crystal device and suction holes respectively provided in the plurality of substrate placing parts, a table having a pallet placing part placing the pallet, a pallet position regulating part regulating the position of the pallet in the pallet placing part and a suction path communicating with the respective suction holes in such a state that the pallet is placed on the pallet placing part and a driving means rotating the table. COPYRIGHT: (C)2008,JPO&INPIT
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