| 摘要 |
PROBLEM TO BE SOLVED: To measure simply a liquid level in a container, and to replenish the liquid. SOLUTION: In a liquid supply system of the container 3 filled with liquid having a temperature different from a room temperature, a liquid inspection measuring module for inspecting and measuring the liquid 2 level in the container and determining whether the liquid is to be supplied or not from the result is equipped with a room temperature sensing unit R<SB>0</SB>, first sensing units R<SB>1</SB>-R<SB>3</SB>, and an inspection measuring unit 1. The room temperature sensing unit R<SB>0</SB>outputs a room temperature sensing signal corresponding to a change of the room temperature in the container. The first sensing units R<SB>1</SB>-R<SB>3</SB>output a first sensing signal corresponding to a change of the liquid temperature in the container. The inspection measuring unit compares both sensing signals, and thereby a position of the sensing unit exposed from the liquid by a change of the liquid level and generating a sensing signal corresponding to the room temperature is detected, and a control signal is outputted corresponding thereto, and a liquid supply device 200 is driven, to thereby supply the liquid. COPYRIGHT: (C)2008,JPO&INPIT
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