| 摘要 |
PROBLEM TO BE SOLVED: To provide a practical oilless pressure sensor for sanitary applications having excellent durability for cryogenic cycle. SOLUTION: A pressure sensor comprises: a metallic measuring diaphragm 1, one face thereof contacting with a fluid to be measured; an insulation thin film 2 deposited layeredly in order on the another face of the measuring diaphragm; a thin film distortion gauge; an electrode pad thin film 4; and a relay lead wire 5 connected with the electrode pad thin film to extract the electric signal of the thin film distortion gauge. The thickness of the electrode thin film is selected as 2.0-6.0μm and the relay lead wire is directly welded to the electrode pad thin film. COPYRIGHT: (C)2008,JPO&INPIT
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