| 摘要 |
PROBLEM TO BE SOLVED: To stabilize the supply of a processing fluid into a processing container in a processing system for supplying the processing fluid into the processing container and process a workpiece. SOLUTION: The processing system is provided with the processing container 30 for housing a workpiece W, a processing fluid generating section 40 for generating the processing fluid, a processing side flow passage 51 for supplying the processing fluid generated in the processing fluid generating section 40 into the processing container 30, and a discharge flow passage 95 for discharging the processing fluid from the processing container 30. In this system, a pressure control mechanism 100 is provided on the discharge flow passage 95, and a bypass side flow passage 52 for not supplying the processing fluid generated in the processing fluid generating section 40 into the processing container 30, but discharging it is provided; and the downstream end of the bypass side flow passage 52 is connected to the discharge flow passage 95 on a side farther upstream than the pressure control mechanism 100. COPYRIGHT: (C)2008,JPO&INPIT |
