COMPOSITE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a composite sensor for achieving miniaturization by reducing a mounted area when detecting an angular speed and acceleration.

SOLUTION: The composite sensor includes: an angular speed detection part formed on a second arm 4 which deflects due to Coriolis force; and a detection element 1 having an acceleration detection part formed on a first arm 2 which deflects due to movement of a weight part 11. The detection element 1 includes a piezoelectric layer and a strain resistant layer laminated by interposing a suppression layer suppressing interaction. The angular speed detection part detects an angular speed by detecting state change of the second arm 4 which deflects due to Coriolis force with the piezoelectric layer. The acceleration detection part detects the acceleration by detecting state change of the first arm 2 which deflects due to movement of the weight part 11 with a strain resistant element 30.

COPYRIGHT: (C)2008,JPO&INPIT