| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for joining optical components where the generation of bubbles and white turbidity in heat-treatment is reduced and where joining strength is excellent. SOLUTION: The optical components are joined each other by a coating step to coat a silane coupling agent consisting of tetraethoxysilane or 3-glycidoxypropyltrimethoxysilane on the joining surfaces of the optical components consisting of silicon-containing substrates to be mutually joined, a thin film forming step to heat the silane coupling agent coated on the joining surfaces at 60-300°C, a surface activating step to introduce a reactive functional group on the surface of the coupling agent by oxygen plasma treatment where microwaves having an output power of around 400 W are irradiated for about 60 seconds to heated silane coupling agent, an adhering step to unify the mutual joining surfaces introduced with the reactive functional group by adhering and a joining step to heat-treat the joined surfaces unified by adhering at 60-300°C. COPYRIGHT: (C)2008,JPO&INPIT
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