GAS CONVEY DEVICE AND COOLING DEVICE MOUNTING STRUCTURE

摘要

Linear electrodes (32) parallel to one another are formed on a surface of a dielectric substrate (31). In the order of arrangement of the linear electrodes (32), a constant number n of the linear electrodes (32) are cyclically connected in parallel and an n-phase drive voltage in which voltage of the same pattern is cyclically varied with a mutually constant phase difference is applied. The frequency of n phases is set so that the cycle is sufficiently small as compared to the time required for diffusion of the gas which has caused a density change by electrostatic gradient force which affects a gas around an uneven electric field generated in the vicinity of the linear electrodes. Thus, the gas in the vicinity of the linear electrodes is conveyed in the direction of arrangement of the linear electrodes.