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发明名称
Vorrichtung und Verfahren zum Vereinzeln und Transportieren von Substraten
摘要
申请公布号
DE102006059809(B4)
申请公布日期
2008.08.21
申请号
DE200610059809
申请日期
2006.12.15
申请人
RENA SONDERMASCHINEN GMBH
发明人
HERTER, RICHARD;KALTENBACH, KONRAD
分类号
B65H3/08;B65G49/07;B65H1/02;B65H3/48;H01L21/67
主分类号
B65H3/08
代理机构
代理人
主权项
地址
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