| 摘要 |
A flow sensor that is designed to overcome problems of conventional flow sensors and can readily obtain high sensitivity without errors due to tilting. A flow sensor includes: a flow channel having a pair of parallel portions; and temperature sensing resistors for heating a fluid to a preset temperature, the temperature sensing resistors being disposed on parts of the parallel portions of the flow channel, to detect a fluid flow rate based on a change in temperature distribution of a flow channel due to a change in flow rate of the fluid flowing through the flow channel, the flow sensor comprising: a first upstream temperature sensing resistor and a first downstream temperature sensing resistor that are disposed in a line on upstream and downstream sides of one of the parallel portions, respectively; and a second upstream temperature sensing resistor and a second downstream temperature sensing resistor that are disposed in a line on upstream and downstream sides of the other parallel portion, respectively.
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