| 摘要 |
The present invention relates to a pad unit capable of picking up a solar cell wafer without contact in a more safe and effective method, and a carrier apparatus with a new desirable structure needed to operate the same. In other words, in a pad unit for picking up a solar cell wafer without contact, which comprises a carrier (20), a part connecting bar (40) and a pickup pad unit (100), and a carrier apparatus including the same, the pickup pad unit (100) includes a plate type pad member (110) formed in a plain plate shape and a product escape prevention sill (111) is formed around the outer periphery of the plate type pad member (110). An air guide hub (120) having a main vertical air guiding groove (121) is formed in an upper center side and each horizontal air guide groove (130) is formed in the end part of the bottom of the main vertical air guiding groove (121). A directional air guide groove (140) generates a constant vortex and lift force in the lower side thereof during a process guiding high pressure air horizontally injected through a horizontal air injection hole (131) at an upward slope angle after straight moving, and is intensively formed on at least two positions of the upper surface of the plate type pad member (110). |
