| 摘要 |
PROBLEM TO BE SOLVED: To provide an entirely small-sized refractive projection objective lens to be produced with a tolerable material use amount, having a preferable compensation state in terms of the chromatic aberration, in particular, the horizontal chromatic aberration. SOLUTION: A purely refractive projection objective lens is designed as a single waist type system having 5 lens groups including a first lens group with a negative refractive power, a second lens group having a positive refractive power, a third lens group having a negative refractive power, a fourth lens group having a positive refractive power, and a fifth lens group having a positive refractive power. The contracted part to have a beam flux contracted most narrowly is disposed in the region of the waist part. The waist distance AT is formed between an object plane and the contracted part X. A condition AT/L≤0.4 is satisfied in the distance ratio AT/L between the waist distance AT and the object image distance L of the projection objective lens. COPYRIGHT: (C)2008,JPO&INPIT
|
