发明名称 Interferometer air-fluctuation monitors and systems comprising same
摘要 Sensors and monitors are disclosed for monitoring density fluctuations in an atmosphere, particularly an atmosphere through which interferometer beam(s) are propagating. An exemplary sensor includes multiple interferometers that produce respective beams propagating in a direction through the atmosphere. The interferometers are of a quantity that is at least one more than necessary for determining position of an object in the direction. A processor is connected to the interferometers so as to receive respective signals from the interferometers. The processor determines, from the interferometer signals, a mutual signal fluctuation that is a function of atmosphere-density fluctuations encountered by the propagating beams in their respective beam paths and sensed by the interferometers.
申请公布号 US2008198369(A1) 申请公布日期 2008.08.21
申请号 US20080070016 申请日期 2008.02.13
申请人 NIKON CORPORATION 发明人 SOGARD MICHAEL R.
分类号 G01N21/00 主分类号 G01N21/00
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