发明名称 MAGNETIC ANALYZER APPARATUS AND METHOD FOR ION IMPLANTATION
摘要 In a magnetic analysis apparatus, high voltage insulation (86, 94) isolates the magnet excitation coil (40), power leads (90) and cooling fluid lines (92) from the ferromagnetic assembly (26, 28, 30, 32, 34) of a sector magnet, and the coil power supply is disposed in a grounded housing (E). A sleeve (94), containing electrical power leads and cooling fluid lines, forms an insulator through the magnet assembly to the coil (40) and the coil is surrounded by electrical insulation providing electrical isolation from the magnet assembly of least 20 KV. The excitation coil comprises alternating coil segments (80) and cooling plates (82) within an impervious cocoon (86) of insulating material of at least 6mm thickness. Yoke and core members (20, 30, 32, 34) of the magnet assembly are disposed outside of the vacuum housing (20) while pole members (28) extend through and are sealed to walls of the vacuum housing. An ion decelerator (60, 61, 62) is in a housing extension at the same voltage potential as the mass analyzer housing.
申请公布号 WO2007146322(A3) 申请公布日期 2008.08.21
申请号 WO2007US13850 申请日期 2007.06.13
申请人 SEMEQUIP, INC.;GLAVISH, HILTON, F. 发明人 GLAVISH, HILTON, F.
分类号 H01J37/00 主分类号 H01J37/00
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