发明名称 TECHNIQUE AND APPARATUS FOR DEPOSITING LAYERS OF SEMICONDUCTOR FOR SOLAR CELL AND MODULE FABRICATION
摘要 The present invention advantageously provides for, in different embodiments, low-cost deposition techniques to form high-quality, dense, well-adhering Group IBIIIAVIA compound thin films with macro-scale as well as micro-scale compositional uniformities. It also provides methods to monolithically integrate solar cells made on such compound thin films to form modules. In one embodiment, there is provided a method of growing a Group IBIIIAVIA semiconductor layer on a base, and includes the steps of depositing on the base a nucleation and/or a seed layer and electroplating over the nucleation and/or the seed layer a precursor film comprising a Group IB material and at least one Group IIIA material, and reacting the electroplated precursor film with a Group VIA material. Other embodiments are also described.
申请公布号 KR20080077103(A) 申请公布日期 2008.08.21
申请号 KR20087010790 申请日期 2008.05.02
申请人 SOLOPOWER, INC. 发明人 BASOL BULENT
分类号 H01L21/06;H01L21/20;H01L31/042 主分类号 H01L21/06
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