| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and highly precise piezoelectric device capable of inputting/outputting control data. SOLUTION: In the piezoelectric device 10, a piezoelectric vibrator piece 13 is mounted on a semiconductor substrate 11 on which a circuit element 12 is formed, the piezoelectric vibrator piece 13 and the circuit element 12 are electrically connected to each other via a through electrode 15. On the surface of the semiconductor substrate 11 on which the circuit element 12 is formed, an input/output terminal 17 for inputting control data to the circuit element 12 or outputting the characteristic data of the piezoelectric device 10 and an external connection terminal 16 to be used for connection with an external circuit board are electrically connected to the circuit element 12. COPYRIGHT: (C)2008,JPO&INPIT |
