| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of correcting a PSD detection value, capable of enhancing positional detection precision by correcting the PSD detection value in response to a PSD. SOLUTION: Values of respective coefficients A, B, C in a quadratic function are obtained preliminarily as to the PSD used actually, a rail (measuring object) is measured by the PSD used actually to obtain a detection value ya, a rail displacement amount x is found based on coefficients a, b of a linear expression,ΔY=Ax<SP>2</SP>+Bx+C is found based on the rail displacement amount x, and the detection value ya is corrected by theΔY to obtain a corrected detection value yb. COPYRIGHT: (C)2008,JPO&INPIT
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