| 摘要 |
A method, system and computer program product for determining matching of a tool set in a production process are disclosed. According to an embodiment, a method for determining matching of a tool set in a production process comprises: selecting a measurement step within the production process, a subset of tools of the tool set being used in the measurement step; collecting production data for each tool of the subset, the production data being related to a process feeder tool; generating a weighted average of the production data for each tool of the subset; and analyzing weighted averages of all tools of the subset using a matching standard to determine matching of the subset.
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