| 摘要 |
PROBLEM TO BE SOLVED: To prevent the phenomenon that a cooling medium flows into a vacuum, and also, loads the vacuum with impurities. SOLUTION: Each seal device is composed of seal rings arranged at intervals in a radial direction, and ring chambers are formed between the seal rings. The ring chambers are connected to the side opposite to the pack-plate in a support plate via a ventilation perforation. COPYRIGHT: (C)2008,JPO&INPIT
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