| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an additive for polishing constituent, which achieves stabilized polishing characteristics. <P>SOLUTION: The additive for polishing constituent contains one or more kinds of amine compound, and alcohol, and the amine compound contains a quaternary ammonium salt. In particular, when an amine compound is contained in high concentration, deposition of amine compound is suppressed by containing alcohol. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
