PIEZOELECTRIC VIBRATOR, AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator and a manufacturing method thereof such that a lid is prevented from breaking and/or cracking and the lid and a package are joined with a small width to prevent a wax material from spreading. SOLUTION: A piezoelectric vibrator has a bottom portion 62 where a piezoelectric vibration chip 1 is fixed and a frame wall portion 64 enclosing the bottom portion 62, and has the package 60 having an opening above the bottom portion 62. The lid 72 overlaps the bottom portion 62 and frame wall portion 64 to close the opening of the package 60. The wax material 78 is interposed between an upper end surface 66 of the frame wall portion 64 and the lid 72 to join the frame wall portion 64 and lid 72. The upper end surface 66 is made of metal. The lid 72 is characterized in that at least portion of a region 82 opposed to the upper end surface 66 is made of metal and a leak prevention region 80 which comprises a surface made of oxide or an organic substance and one of frame-shaped projection and recess surfaces made of metal and prevents wet spreading of a fused solder material 78 is formed on a sealing space side inside at least the opposed region 82. COPYRIGHT: (C)2008,JPO&INPIT