Barrier layer creating process for microstructured component involves preparing component in plasma reactor, plasma treatment, and supplying precursor and carrier gas

摘要

The barrier layer creating process consists of preparing the component in a plasma reactor with steam doser and gas supply; plasma treating the component in the region to be coated with a plasma from inert carrier gas to activate it, then supplying a steam or gas precursor to the carrier gas by steam dosing, gas exchanging back to inert carrier gas, and repeating the process several times.