发明名称 STOCKER
摘要 A stocker comprises a rack body (7)(storage rack) capable of storing a plurality of cassettes (35) arranged in the vertical and horizontal directions, rails (28) provided parallel with the rack body (7), a stacker crane (5) capable of traveling on the rails (28), and a conveyor port (17) for loading and unloading the cassettes (35) to and from the stocker (6). The stacker crane (5) includes a transfer means (36) having a lift frame (32) movable in the vertical direction, and a linear slide fork (33) installed on the lift frame (32) and movable forward and backward in the direction facing to the rack body (7) and a conveyor table (34) with rollers (30) for receiving the cassettes (35) from the transfer means (36) and delivering them to the conveyor port (17).
申请公布号 KR20080077121(A) 申请公布日期 2008.08.21
申请号 KR20087011848 申请日期 2006.11.17
申请人 ASYST TECHNOLOGIES JAPAN, INC. 发明人 KASAHARA HIROYUKI
分类号 B65G1/04;B65G1/00;H01L21/673 主分类号 B65G1/04
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