| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma nitriding treatment system where the body to be treated can be efficiently subjected to nitriding treatment. SOLUTION: A heating chamber S1 where the body 2 to be treated is subjected to heating treatment; a nitriding chamber S2 where the body 2 to be treated subjected to the heating treatment in the heating chamber S1 is subjected to nitriding treatment by generating plasma; and a cooling chamber S3 where the body 2 to be treated subjected to the nitriding treatment in the nitriding chamber S2 is subjected to cooling treatment are arranged in line in the horizontal direction. Further, the system is provided with a mechanism 6 for carrying the body to be treated where the body 2 to be treated is carried to the heating chamber S1, the nitriding chamber S2, and the cooling chamber S3 in order. COPYRIGHT: (C)2008,JPO&INPIT
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