| 摘要 |
PROBLEM TO BE SOLVED: To prevent breakage of a contact end of an electrode and damages to an object body to be probed. SOLUTION: The contact probe comprises an abutting part 5a disposed so as to allow relative movement to a base part 2a in the probing direction; a center electrode 4a and an outer electrode 3a, disposed so as to allow movement relative with respect to the base part 2a in the probing direction, independently of the abutting part 5a and that are mutually insulated; springs 6a and 8a that energizes the base part 2a and the abutting part 8a in the direction opposite to the probing direction; the spring 6a that energizes the base part 2a and the outer electrode 3a in the direction opposite to the probing direction; and a spring 7a that energizes the center electrode 4a and the outer electrode 3a in the direction opposite to the probing direction, wherein, an abutting end of the abutting part protrudes farther forward than contact ends of the center electrode 4a and the outer electrode 3a in the probing direction in a non-probing state. COPYRIGHT: (C)2008,JPO&INPIT
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