| 摘要 |
PROBLEM TO BE SOLVED: To improve the accuracy of a test by enabling detection on whether accurate bias application to a device to be measured is performed or not. SOLUTION: This semiconductor testing device for inspecting the electric characteristic of an electronic component includes a bias power source 31 for outputting a bias to be applied to the electronic component 1, a detector 14 for detecting a signal output from the electronic component to which the bias is applied, and an analog/digital converter 15 for converting an analog detection signal output from the detector into a digital detection signal. The device also includes a monitor circuit 33 for detecting the bias output from the bias power source, and an analog/digital converter 34 for the bias power source for converting a bias analog detection signal output from the monitor circuit into a digital detection signal. COPYRIGHT: (C)2008,JPO&INPIT
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