发明名称 |
Method for Forming Multi-Layered Binary Oxide Film for Use in Resistance Random Access Memory |
摘要 |
The invention relates to a method for forming a multi-layered binary oxide film for ReRAM. The method includes forming a lower electrode layer on a substrate; forming a metal layer on the lower electrode layer in a vacuum atmosphere; oxidizing the metal layer into a binary oxide film in a vacuum atmosphere; repeating the steps of forming and oxidizing the metal layer to form a desired thickness of the multi-layered binary oxide film; and forming an upper electrode layer on the multi-layered film. The method allows a nonvolatile memory device more efficient than the conventional perovskite structure in a simple process without concerns for surface contamination since the metal layer is formed and oxidized in a vacuum atmosphere. |
申请公布号 |
US2008200003(A1) |
申请公布日期 |
2008.08.21 |
申请号 |
US20060994551 |
申请日期 |
2006.07.04 |
申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG |
发明人 |
HONG JIN-PYO;DO YOUNG-HO;YOON KAP-SOO;JEONG KOO-WOONG |
分类号 |
H01L21/316 |
主分类号 |
H01L21/316 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|