发明名称 |
System for relative movement between two plates and positioning device comprising such a movement system |
摘要 |
A system provides for relative movement between two plates that are substantially parallel to a plane defined by a first direction and a second direction. The system includes a first unit that is configured to allow a relative movement between the two plates in a third direction that is orthogonal to the plane. The first unit also independently prevents a relative movement between the two plates in the plane. The system further includes a second unit that is configured to allow one plate to relatively travel with respect to the other plate about the first and second directions. |
申请公布号 |
IL244591(D0) |
申请公布日期 |
2016.07.31 |
申请号 |
IL20160244591 |
申请日期 |
2016.03.14 |
申请人 |
MICRO-CONTROLE SPECTRA-PHYSICS |
发明人 |
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分类号 |
H01L |
主分类号 |
H01L |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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