IMAGE ROTATION DEVICES AND THEIR APPLICATIONS

摘要

An optical inspection device of a device-under-test is disclosed, said device comprising a light source, an image rotator, a parabolic reflector, and one or more detectors, wherein said light source provides a light beam traveling through said image rotator and reflecting off said parabolic reflector to a device-under-test and thereby creating diffracted light beams off said device-under-test, and said diffracted light beams reflecting off said parabolic reflector and travels through said image rotator and are received by the detectors.