| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a simple and easy method for producing conductive diamond-like carbon having high conductive performance to a degree of being suitably utilizable as an electrode. <P>SOLUTION: The method for producing film-shaped diamond-like carbon is provided by which a gaseous starting material is converted into plasma and film deposition is performed, wherein as the gaseous starting material, a compound containing carbon atoms and nitrogen atoms in the molecule is used. As the compound, hydrogen cyanide, acetonitrile, ethane cyanide or the like can be used. By using a plasma CVD (chemical vapor deposition) system capable of feeding negative bias power to a substrate when the film deposition is performed, film deposition time can be further shortened as well. <P>COPYRIGHT: (C)2008,JPO&INPIT |
