发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that suppresses the growth of a crack formed in a layer to be transferred, and achieves stable operation. SOLUTION: The semiconductor device has a substrate 10 on which the layer 12 to be transferred is arranged, and a silane coupling agent 14 chemically bonded to the surface of the layer 12 to be transferred. The silane coupling agent 14 is chemically bonded to the surface of the crack 16 formed in the layer 12 to be transferred, and a void formed by the crack 16 is filled with the silane coupling agent 14. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008192876(A) 申请公布日期 2008.08.21
申请号 JP20070026467 申请日期 2007.02.06
申请人 SEIKO EPSON CORP 发明人 KAMINE TETSUJI;MIYASAKA MITSUTOSHI
分类号 H01L21/02;H01L21/336;H01L27/12;H01L29/786 主分类号 H01L21/02
代理机构 代理人
主权项
地址