| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamper having small surface roughness in a non-drawing part. SOLUTION: The stamper includes a stamper body of Ni including a concave and convex surface and a surface layer of Ni-V alloy which is formed on the concave and convex surface of the stamper body and in which the content of V is less than 3 at.%. COPYRIGHT: (C)2008,JPO&INPIT
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