| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of utilizing a merit generated thereby even when using femtosecond laser light, preventing the constitution of an optical system from becoming complicated, and measuring highly accurately even fine irregularities on the surface of a specimen. SOLUTION: This device is equipped with a reflection member (deflection element 21) having a reflection surface part (fine mirror 212) for reflecting measuring light from a light source (laser light source 11) to the specimen; a support mechanism 24 having a support part (pivot 243) for supporting the reflection member from the back side facing to the reflection surface part, and a rotation part for supporting rotatably the reflection member around a rotating shaft (a main scanning rotating shaft 40, a sub-scanning rotating shaft 50); a driving part (driving circuit 26) for driving rotatively the reflection surface part around the rotating shaft; and a light receiving part (photodetector 14) for receiving return light formed from reflection of the measuring light by the specimen. In the device, the reflection surface part near the rotating shaft is irradiated with the measuring light, and the shape of the specimen is measured based on information from the light receiving part. COPYRIGHT: (C)2008,JPO&INPIT
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