| 摘要 |
An ion implantation apparatus using tungsten coating parts and a method for manufacturing the same are provided to extend a replacement interval and to reduce a maintenance cost by coating tungsten on a base material. An ion implantation apparatus includes a source head assembly for generating an ion beam and a manipulator assembly. A chamber body(10) of an arc chamber(100) generates the ion beam at the source head assembly. The chamber body is made of a bottom member(12), a side member(11), and an upper member(13) to configure an ion beam generation space, A carbon material is a base material of the chamber body. A tungsten coating layer is formed on inner surfaces of the bottom member, the side member, and the upper member. A suppression electrode of the manipulator assembly is made of a carbon material as a base material. A tungsten layer is formed on a surface of the suppression electrode made of the carbon material. The carbon material is graphite.
|
