发明名称 CHIP PACKAGE AND FABRICATION METHOD THEREOF
摘要 A chip package included a chip, a first though hole, a laser stop structure, a first isolation layer, a second though hole and a conductive layer. The first though hole is extended from the second surface to the first surface of the chip to expose a conductive pad, and the laser stop structure is disposed on the conductive pad exposed by the first through hole, which an upper surface of the laser stop structure is above the second surface. The first isolation layer covers the second surface and the laser stop structure, and the first isolation layer has a third surface opposite to the second surface. The second though hole is extended from the third surface to the second surface to expose the laser stop structure, and a conductive layer is on the third surface and extended into the second though hole to contact the laser stop structure.
申请公布号 US2016229687(A1) 申请公布日期 2016.08.11
申请号 US201615008371 申请日期 2016.01.27
申请人 XINTEC INC. 发明人 WEN Ying-Nan;YIU Ho-Yin;LIU Chien-Hung
分类号 B81B7/00;B81C1/00 主分类号 B81B7/00
代理机构 代理人
主权项 1. A chip package, comprising: a substrate; a cap layer disposed on the substrate, and the cap layer having a first opening penetrating the cap layer; a first chamber disposed between the substrate and the cap layer; a first micro-electromechanical device disposed in the first chamber; a first plug disposed in the first opening; and a first seal cap disposed above the cap layer to seal the first opening.
地址 Taoyuan City TW