发明名称
摘要 PROBLEM TO BE SOLVED: To provide an adhesive sheet that has high reliability and can be manufactured at a low cost. SOLUTION: An adhesive sheet is provided with an adhesive layer with a pressure-sensitive adhesive layer interposed on one side of a base material layer, and the number of voids with a diameter of 50&mu;m or larger contained between the pressure-sensitive adhesive layer and the adhesive layer is 100 or less per 1m<SP>2</SP>. Thereby, detection of foreign materials in the adhesive sheet can be performed simply, and moreover, the transfer of the foreign materials mixed in the adhesive sheet to the adhesive layer can be prevented. Thus, the adhesive sheet that has high reliability and can be manufactured at a low cost is obtained. COPYRIGHT: (C)2004,JPO
申请公布号 JP4135149(B2) 申请公布日期 2008.08.20
申请号 JP20030197695 申请日期 2003.07.16
申请人 发明人
分类号 H01L21/52;H01L21/301 主分类号 H01L21/52
代理机构 代理人
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