发明名称 Microelectromechanical gyroscope with suppression of capacitive coupling spurious signals and control method of a microelectromechanical gyroscope
摘要 A microelectromechanical gyroscope includes: a microstructure (102) having a first mass (107), which can oscillate according to a first axis (X), and a second mass (108), constrained to the first mass (107) so as to oscillate according to a second axis (Y) in response to a rotation (©) of the microstructure (102); and a driving device (103), coupled to the microstructure (102) to maintain the first mass (107) in oscillation at a resonance frequency (É R ). The driving device (103) is provided with a low-pass filter, (114) having a passband (PB) such that the resonance frequency (É R ) is comprised in the passband (PB), and a disturbance frequency (É D ) associated to disturbance signals (I ADD (t), V AO (t)) due to coupling between the first mass (107) and the second mass (108) is not comprised in the passband (PB).
申请公布号 EP1959234(A1) 申请公布日期 2008.08.20
申请号 EP20070425077 申请日期 2007.02.13
申请人 STMICROELECTRONICS S.R.L. 发明人 PRANDI, LUCIANO;CAMINADA, CARLO;LASALANDRA, ERNESTO
分类号 G01C19/56 主分类号 G01C19/56
代理机构 代理人
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