METHOD AND APPARATUS FOR CARRYING A PLATE-SHAPED PART

摘要

A method and an apparatus for carrying a plate-shaped object are provided to substantially horizontally place the plate-shaped object and carry a bottom surface and a top surface of the plate-shaped object while supporting a bottom surface and a top surface of the plate-shaped object. Pads(18) and suction parts(19) are alternately arranged lengthwise along a finger(16B). The pad is in contact with a bottom surface of a plate-shaped object(17) to support the plate-shaped object. The suction parts are connected to a vacuum pump through a fluid passage installed in the finger and a hand(15) so that the bottom surface of the plate-shaped object is sucked. The pad is attached onto a top surface of the finger through a shim(20) to adjust the thickness of the shim so that the height of the pad is regulated.