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发明名称
摘要
申请公布号	JP4135564(B2)	申请公布日期	2008.08.20
申请号	JP20030159888	申请日期	2003.06.04
申请人		发明人
分类号	H01L21/76;H01L21/762;H01L21/763;H01L21/822;H01L21/8234;H01L27/04;H01L27/06;H01L27/08;H01L27/12	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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